Initial gap (nm) | Pull-in voltage (v) —clamped-clamped | Pull-in voltage (v) —clamped-clamped—vdW | Pull-in voltage (v)—four sides fixed |
0.514 | 0.2118 | 0.465 | 0.4707 |
1.543 | 1.1763 | 2.3536 | 5.8841 |
2.72 | 15.3054 | 21.4275 | 79.5879 |
4.3504 | 60.2962 | 64.0647 | 177.1202 |