Initial gap (nm)

Pull-in voltage (v) —clamped-clamped

Pull-in voltage (v) —clamped-clamped—vdW

Pull-in voltage (v)—four sides fixed

0.514

0.2118

0.465

0.4707

1.543

1.1763

2.3536

5.8841

2.72

15.3054

21.4275

79.5879

4.3504

60.2962

64.0647

177.1202